Deposition of carbonitride titanium coatings by magnetron sputtering and its effect on tribo-mechanical properties
DOI:
https://doi.org/10.31643/2022/6445.19Keywords:
titanium carbonitride, magnetron sputtering, coating, wear resistance, coefficient of friction.Abstract
Metal parts in machinery often fail as a result of damage caused by wear and tear, resulting in the loss of functionality of the products. Thin film solid nitride coatings are used to improve the wear resistance and service life of parts and are considered to be effective. The article presents a brief overview of modern literature in the field of obtaining wear resistant coatings of titanium carbonitride by using magnetron sputtering. The review presents a detailed assessment of the scientific results obtained depending on the deposition parameters and the conditions for obtaining coatings. The results of the coefficient of friction, wear rate of the coating and counterbody, nanohardness and adhesion force of coatings obtained by magnetron sputtering and its modifications are shown. The influence of alloying elements on the mechanical and tribological properties of titanium carbonitride coatings is considered. Recent advances in the production of titanium carbonitride coatings with improved wear characteristics are discussed.
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