Morphological and Crystallographic Investigation of CVD-Grown MoS₂

Ye. Otunchi; A. Umirzakov; E. Dmitriyeva; A. Shongalova; A. Kemelbekova

doi:10.31643/2026/6445.38

Authors

Ye. Otunchi Institute of Physics and Technology; Satbayev University
A. Umirzakov Institute of Physics and Technology; Satbayev University
E. Dmitriyeva Institute of Physics and Technology; Satbayev University
A. Shongalova Institute of Physics and Technology; Satbayev University
A. Kemelbekova Institute of Physics and Technology; Satbayev University

DOI:

https://doi.org/10.31643/2026/6445.38

Keywords:

Molybdenum disulfide, CVD synthesis, 2D materials, Raman spectroscopy, morphology.

Abstract

This paper presents a study of the structural characteristics of a promising MoS₂-based material obtained by chemical vapor deposition (CVD). Optimization of the synthesis process to obtain the desired structure is also presented. The optimal parameter for the synthesis of CVD MoS₂ crystals was found to be the maximum sulfurization temperature of 780 °C with an exposure time of about 15 minutes, the heating temperature of the sulfur source zone of 250 °C, the distance between the sulfur and molybdenum sources of 25 cm, and the distance between the molybdenum source and the substrate was 1.5 cm. The morphology and elemental composition of the obtained samples were studied using scanning electron microscopy (SEM) with energy dispersive X-ray spectroscopy (EDS). Using SEM, it was revealed that MoS₂ crystals are formed in a triangular shape and are evenly distributed over the surface of the substrate. The maximum sizes of crystallites reach 6 microns. EMF mapping of crystallites confirmed the homogeneous distribution of molybdenum and sulfur in the structure, revealing only minor variations in composition at the grain boundaries. The quality and quantity of the sample layer were studied using Raman spectroscopy. The results showed two characteristic peaks (vibrational modes E_2g¹ and A_1g) of nanoscale MoS₂. The peaks have a sharp shape and are located at a distance of ≈20.9 cm^-1, which may indicate the high quality of the crystal structure of the obtained crystallites. The results obtained emphasize the effectiveness of the chosen approach and the importance of the work for the development of 2D materials technologies.

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Author Biographies

Ye. Otunchi, Institute of Physics and Technology; Satbayev University

Master’s student, Institute of Physics and Technology, Satbayev University, 050032, Almaty, Kazakhstan. ORCID ID: https://orcid.org/0009-0006-4361-8099

A. Umirzakov, Institute of Physics and Technology; Satbayev University

PhD candidate, Researcher, Institute of Physics and Technology, Satbayev University, Ibragimov str. 11, 050032, Almaty, Kazakhstan. ORCID ID: https://orcid.org/0000-0002-0941-0271

E. Dmitriyeva, Institute of Physics and Technology; Satbayev University

Candidate of Physico-Mathematical Sciences, Professor, Institute of Physics and Technology, Satbayev University, Ibragimov str. 11, 050032, Almaty, Kazakhstan; Manul Technologies, Astana, Kazakhstan. ORCID ID: https://orcid.org/0000-0002-1280-2559

A. Shongalova, Institute of Physics and Technology; Satbayev University

PhD, Institute of Physics and Technology, Satbayev University, Ibragimov str. 11, 050032, Almaty, Kazakhstan. ORCID ID: https://orcid.org/0000-0002-7352-9007

A. Kemelbekova, Institute of Physics and Technology; Satbayev University

PhD, Institute of Physics and Technology, Satbayev University, Ibragimov str. 11, 050032, Almaty, Kazakhstan; Manul Technologies, Astana, Kazakhstan. ORCID ID: https://orcid.org/0000-0003-4813-8490

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