Modeling the influence of technological parameters of the magnetron sputtering process using the Caroline D12C system on the proportion of nanocrystallites in the structure of thin silicon films

K.S. Tolubaev; B.A. Zhautikov; N.N. Zobnin; G.S. Dairbekova; S.K. Kabieva; R.T. Al-Kasasbeh

doi:10.31643/2025/6445.27

Authors

K.S. Tolubaev Karaganda Industrial University
B.A. Zhautikov Karaganda Industrial University
N.N. Zobnin Karaganda Industrial University
G.S. Dairbekova Satbayev University
S.K. Kabieva Karaganda Industrial University
R.T. Al-Kasasbeh University of Jordan

DOI:

https://doi.org/10.31643/2025/6445.27

Keywords:

Nanosized silicon, magnetron sputtering, Caroline D12C, film, mathematical modeling, correlation-regression analysis, target.

Abstract

The experimental dependence of the fraction of nano-sized modification of silicon in thin films obtained by magnetron sputtering on the main technological indicators of the process - specific power on the target, pressure in the working chamber, pulsation frequency of the voltage supplied to the target - has been studied. The data was processed using the method of multiple correlation-regression analysis and a corresponding mathematical model was obtained that describes the experimental dependence. It has been established that the specific power at the target does not significantly affect the fraction of nanosilicon in the film. The voltage frequency on the target has only a positive effect and is therefore limited only by the technical capabilities of the sputtering equipment. The pressure in the working chamber has an optimal value because in the mathematical model for this factor there are both positive and negative coefficients. When analyzing the model by calculation, it was found that the largest proportion of nanosilicon in the film, 75.06%, is achieved at a voltage frequency on the target of 100 Hz and pressure in the working chamber of 1.9 Pa. These data are preliminary due to the limited number of experiments.

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Author Biographies

K.S. Tolubaev, Karaganda Industrial University

Doctoral student, Karaganda Industrial University, Temirtau, Kazakhstan.

B.A. Zhautikov, Karaganda Industrial University

Doctor of Technical Sciences, Professor, Karaganda Industrial University, Temirtau, Kazakhstan.

N.N. Zobnin, Karaganda Industrial University

Candidate of Technical Sciences, Karaganda Industrial University, Temirtau, Kazakhstan.

G.S. Dairbekova, Satbayev University

PhD, Satbayev University, Almaty, Kazakhstan.

S.K. Kabieva, Karaganda Industrial University

Candidate of Chemical Sciences, Associate Professor, Karaganda Industrial University, Temirtau, Kazakhstan.

R.T. Al-Kasasbeh, University of Jordan

PhD, Professor, University of Jordan, Amman, Jordan.

References

Bergmann RB, Werner JH. The future of crystalline silicon films on foreign substrates. Thin Solid Films. 2002; 403:162-169. https://doi.org/10.1016/S0040-6090(01)01556-5

Chan CK, Peng H, Liu G, McIlwrath K, Zhang XF, Huggins RA, Cui Y. High-performance lithium battery anodes using silicon nanowires. Nature nanotechnology. 2008; 3(1):31-35. https://doi.org/10.1038/nnano.2007.411

Yao W, Zou P, Wang M, Zhan H, Kang F, Yang Ch. Design principle, optimization strategies, and future perspectives of anode-free configurations for high-energy rechargeable metal batteriesю Electrochemical Energy Reviews. 2021; 4:601-631. https://doi.org/10.1007/s41918-021-00106-6

Nussupov KK, Beisenkhanov NB, Zharikov SK, et al. Structure and composition of silicon carbide films synthesized by ion implantation. Phys. Solid State. 2014; 56:2307-2321. https://doi.org/10.1134/S1063783414110237

Xin Chen, Chuankai Fu, Yuanheng Wang, Jiaxin Yan. Recent advances of silicon-based solid-state lithium-ion batteries. 2024; 19:100310. https://doi.org/10.1016/j.etran.2023.100310

Karimi Z, Sadeghi A, Ghaffarinejad A. The comparison of different deposition methods to prepare thin film of silicon-based anodes and their performances in Li-ion batteries. Journal of Energy Storage. 2023; 72:108282. https://doi.org/10.1016/j.est.2023.108282

Golubev VG, Davydov VYu, Medvedev AV, Pevtsov AB, Feoktistov NA. Raman spectra and electrical conductivity of silicon films with a mixed amorphous-crystalline composition: determination of the volume fraction of the nanocrystalline phase. Solid State Physics. 1997; 39(8):1348-1353. https://doi.org/10.1134/1.1130042

Sharma M, Panigrahia J, Komaralaa VK. Nanocrystalline silicon thin film growth and application for silicon heterojunction solar cells: a short review. Nanoscale advances. 2021; 12:3373-3383. https://doi.org/10.1039/d0na00791a

Lin H, Yang M, Ru X, Wang G, Yin S, Peng F, et al. Silicon heterojunction solar cells with up to 26.81% efficiency achieved by electrically optimized nanocrystalline-silicon hole contact layers. Nature Energy. 2023; 8:789-799. https://doi.org/10.1038/s41560-023-01255-2

Automatic installation of magnetron and thermal coating "Caroline D12A" [Electronic resource] "Caroline D12A" Electronic training manual. URL: https://ipsiras.ru/Lab/CKPO/Nanofot/CarolineD12A.htm

Mazinov A, Shevchenko A, Bahov V. Quantum Interactions of Optical Radiation with the Defect Centres in the Tails of the Forbidden Band of Amorphous Materials. Optica Applicata. 2014, 44. https://doi.org/10.5277/oa140213

Mazinov S, Shevchenko AI, Voskresensky VM. BULLETIN of the L N Gumilyov Eurasian National University Mathematics Computer Science Mechanics Series. 2019.

Goli M, González–Vélez H. Autonomic Coordination of Skeleton-Based Applications over CPU/GPU Multi-Core Architectures. International Journal of Parallel Programming. 2016; 45(2):203-224. https://doi.org/10.1007/s10766-016-0419-4

Shkunov M N, Österbacka R, Fujii A, Yoshino K, Vardeny Z V. Laser Action in Polydialkylfluorene Films: Influence of Low-Temperature Thermal Treatment. Applied physics letters. 1999; 74(12):1648-1650. https://doi.org/10.1063/1.123642

Chan C K, Peng H, Liu G, McIlwrath K, Zhang X F, Huggins R A, Cui Y. High-Performance Lithium Battery Anodes Using Silicon Nanowires. Nature Nanotechnology. 2007; 3(1):31-35. https://doi.org/10.1038/nnano.2007.411

Wang X-L, Han W-Q. Graphene Enhances Li Storage Capacity of Porous Single-Crystalline Silicon Nanowires. ACS Applied Materials & Interfaces. 2010; 2(12);3709-3713. https://doi.org/10.1021/am100857h

Li X, Zhi L. Managing Voids of Si Anodes in Lithium Ion Batteries. Nanoscale. 2013; 5(19):8864. https://doi.org/10.1039/c3nr03197g

Ranganath Teki, Moni Kanchan Datta, Krishnan R, Parker T E, Lu T-M, Kumta P N, Nikhil Koratkar. Nanostructured Silicon Anodes for Lithium Ion Rechargeable Batteries. Small. 2009; 5(20):2236-2242. https://doi.org/10.1002/smll.200900382

Syed Abdul Ahad, Kennedy T, Geaney H. Si Nanowires: From Model System to Practical Li-Ion Anode Material and Beyond. ACS energy letters. 2024; 9(4):1548-1561. https://doi.org/10.1021/acsenergylett.4c00262

Imtiaz S, Amiinu I S, Storan D, Kapuria N, Geaney H, Kennedy T, Ryan K M. Dense Silicon Nanowire Networks Grown on a Stainless‐Steel Fiber Cloth: A Flexible and Robust Anode for Lithium‐Ion Batteries. Advanced Materials. 2021; 33(52):2105917. https://doi.org/10.1002/adma.202105917

Collins G A, Kilian S, Geaney H, Ryan K M. A Nanowire Nest Structure Comprising Copper Silicide and Silicon Nanowires for Lithium‐Ion Battery Anodes with High Areal Loading. Small. 2021; 17(34):2102333. https://doi.org/10.1002/smll.202102333