Tolubaev K, Zhautikov B, Zobnin N, Dairbekova G, Kabieva S, Al-Kasasbeh R. Modeling the influence of technological parameters of the magnetron sputtering process using the Caroline D12C system on the proportion of nanocrystallites in the structure of thin silicon films. CUMR [Internet]. 2024 Jul. 12 [cited 2024 Nov. 24];334(3):51-8. Available from: http://kims-imio.com/index.php/main/article/view/482